Propylene glycol methyl ether acetate

Names
Preferred IUPAC name

1-Methoxypropan-2-yl acetate

Other names

PGMEA; 1-methoxy-2-propanyl acetate; PM Acetate; Propylene glycol monomethyl ether acetate

Identifiers

CAS Number

* 108-65-6 Y

3D model (JSmol)

* Interactive image

ChemSpider |

* 7658

PubChem CID

* 7946

UNII |

* PA7O2U6S2Q Y

InChI

* InChI=1S/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3

Key: LLHKCFNBLRBOGN-UHFFFAOYSA-N

* InChI=1/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3

Key: LLHKCFNBLRBOGN-UHFFFAOYAD

SMILES

* CC(COC)OC(=O)C

Properties

Chemical formula

| C6H12O3
Molar mass | 132.159 g·mol−1
Appearance  | Colorless liquid
Density | 0.962 g/cm3
Melting point |  −67 °C (−89 °F; 206 K)
Boiling point |  146 °C (295 °F; 419 K)

Solubility in water

| 23.0g /100mL H2O（25 °C
log P | 0.26[1]
Hazards

GHS hazard statements

| H226, H402
NFPA 704 (fire diamond)  |

Flash point |  45 °C (113 °F; 318 K)

Autoignition
temperature

|  333 °C (631 °F; 606 K)
Explosive limits | 1.5% - 7%

Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Infobox references

Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,[3] by Shell Chemical under the name methyl proxitol acetate,[4][5] and by Eastman under the name PM Acetate.[6]

In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[7] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[8] due to its evaporation into ambient air.

## References

1. ↑ "1-Methoxy-2-propyl acetate_msds". https://www.chemsrc.com/en/cas/108-65-6_242974.html. Retrieved 28 September 2019.
2. ↑ GOV, NOAA Office of Response and Restoration, US. "PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA". http://cameochemicals.noaa.gov/chemical/24058.
3. ↑ "Search | Dow Inc.". http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf.
4. ↑ "Propylene glycol methyl ether (PGME) and Propylene glycol methyl ether acetate (PGMEA) [MethylPROXITOL and MethylPROXITOL acetate \- Product Stewardship Summary"]. Archived from the original on 2014-08-08. https://web.archive.org/web/20140808050817/http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf. Retrieved 2014-08-01.
5. ↑ "Shell Glycol Ethers and Acetates". https://www.shell.com/business-customers/chemicals/our-products/solvents-chemical/glycol-ethers.html.
6. ↑ "Eastman EastaPure PM Acetate". 23 September 2019. https://www.eastman.com/Literature_Center/F/F346.pdf. Retrieved 23 September 2019.
7. ↑ "HMDS primer (hexamethyldisilazane), DEATS and PGMEA". https://www.microsi.com/product-category/lithography/adhesion-promoters/.
8. ↑ "Airborne & Surface Molecular Contamination Guidelines". http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf.

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*[CID]: Compound ID
*[H226]: Flammable liquid and vapour
*[H402]: Harmful to aquatic life