Yttrium oxyfluoride

Yttrium oxyfluoride  Identifiers

3D model (JSmol)

* Interactive image

PubChem CID

* 161123050

InChI

* InChI=1S/FH.O.Y/h1H;;/q;-2;+3/p-1

Key: ULEWOPXGNWLKFY-UHFFFAOYSA-M

SMILES

* [Y+3].[O-2].[F-]

Properties

Chemical formula

| YOF
Molar mass | 123.903 g/mol
Appearance  | white powder
Density | 5.18 g/cm3
Structure

Crystal structure

| tetragonal

Space group

| P4/nmm[1]

Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Infobox references

Tracking categories (test):

* SizeSet

Yttrium oxyfluoride is an inorganic chemical compound with the formula YOF.[2] Under normal conditions, the compound is a colorless solid.[3]

## Contents

* 1 Synthesis
* 2 Physical properties
* 3 Applications
* 4 References

## Synthesis

Yttrium oxyfluoride may be formed in the decomposition of crystalline hydrate of yttrium fluoride upon heating to 900 °C in a vacuum:

2YF3⋅1/2H2O →τ,900oC YOF+YF3+2HF

Yttrium oxyfluoride can also be made by hydrolysis of yttrium fluoride with superheated steam at 800 °C:

2YF3+H2O →800oC YOF+2HF

## Physical properties

Yttrium oxyfluoride forms colorless crystals of tetragonal crystal system; its cell parameters are: a = 0.3910 nm, c = 0.5431 nm. According to hexagonal crystal family, the cell parameters are: a = 0.38727 nm, c = 1.897 nm, Z = 6.

## Applications

Stable yttrium oxyfluoride material is used for inner walls of plasma process equipment.[4][5]

## References

1. ↑ Donnay, Joseph Désiré Hubert (1973) (in en). Crystal Data: Inorganic compounds. National Bureau of Standards. https://www.google.ch/books/edition/Crystal_Data_Inorganic_compounds/5lVCBwmZsLYC?hl=en&gbpv=1&dq=Yttrium+oxyfluoride+crystals&pg=RA4-PA102&printsec=frontcover. Retrieved 15 July 2025.
2. ↑ Mann, A. W.; Bevan, D. J. M. (1970). "The crystal structure of stoichiometric yttrium oxyfluoride, YOF". Acta Crystallographica B26 (12): 2129–2131. doi:10.1107/S0567740870005496. Bibcode: 1970AcCrB..26.2129M. http://scripts.iucr.org/cgi-bin/paper?S0567740870005496. Retrieved 16 June 2017.
3. ↑ Рипан, Р.; Четяну, И. (1992) (in ru). Неорганическая химия.
4. ↑ Shiba, Yoshinobu (January 2017). "Stable yttrium oxyfluoride used in plasma process chamber". Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (2): 021405. doi:10.1116/1.4975143. Bibcode: 2017JVSTA..35b1405S.
5. ↑ Tsunoura, Toru; Yoshida, Katsumi; Yano, Toyohiko; Kishi, Yukio (2 May 2017). "Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics". Japanese Journal of Applied Physics 56 (6S2). doi:10.7567/JJAP.56.06HC02. Bibcode: 2017JaJAP..56fHC02T.

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Yttrium compounds

* YAs
* YAl3(BO3)4
* Y3Al5O12
* Y3Fe5O12
* YB6
* YBr3
* YCl3
* YF3
* YN
* Y(NO3)3
* YOF
* YP
* YPO4
* YSb
* YVO4
* Y2O3
* Y2S3

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Fluorine compounds

| HF |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | He

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LiF | BeF2 |  |  |  |  |  |  |  |  |  |  | BF3
B2F4 | CF4 | NF3 | OF2 | F− | Ne
NaF | MgF2 |  |  |  |  |  |  |  |  |  |  | AlF3 | SiF4 | PF3
PF5 | SF2
SF4
SF6 | ClF
ClF3
ClF5 | Ar
KF | CaF2 | ScF3 | TiF3
TiF4 | VF3
VF4
VF5 | CrF2
CrF3
CrF4
CrF5 | MnF2
MnF3 | FeF2
FeF3 | CoF2
CoF3 | NiF2 | CuF
CuF2 | ZnF2 | GaF3 | GeF4 | AsF3
AsF5 | SeF4
SeF6 | BrF3
BrF5 | KrF2
RbF | SrF2 | YF3 | ZrF4 | NbF4
NbF5 | MoF5
MoF6 | TcF6 | RuF3
RuF4
RuF5
RuF6 | RhF6 | PdF2 | AgF
AgF2
Ag2F | CdF2 | InF3 | SnF2
SnF4 | SbF3
SbF5 | TeF4 | IF
IF3
IF5
IF7 | XeF2
XeF4
XeF6
CsF | BaF2 | *  | HfF4 | TaF5 | WF4
WF6 | ReF4
ReF5
ReF6
ReF7 | OsF4
OsF5
OsF6 | IrF3
IrF5
IrF6 | PtF4
PtF6 | AuF3
Au2F10
AuF5·F2
| HgF2
Hg2F2 | TlF
TlF3 | PbF2
PbF4 | BiF3
BiF5 | Po | At | RnF2
Fr | Ra | **  | Rf | Db | Sg | Bh | Hs | Mt | Ds | Rg | Cn | Nh | Fl | Mc | Lv | Ts | Og
|  | ↓ |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
| * | LaF3 | CeF3 | Pr | NdF3 | PmF3 | SmF3
| Eu | Gd | Tb | DyF3 | Ho | Er | Tm | YbF3
| Lu |
| ** | AcF3 | ThF4 | Pa | UF3
UF4
UF5
UF6 | NpF3
NpF4
NpF5
NpF6
| PuF3
PuF4
PuF5
PuF6 | AmF3
AmF4 | CmF3 | Bk | Cf | Es | Fm | Md | No | Lr |

Other|

* AgBF4
* AgPF6
* Cs2AlF5
* K3AlF6
* Na3AlF6
* KAsF6
* LiAsF6
* NaAsF6
* HBF4
* KBF4
* LiBF4
* NaBF4
* RbBF4
* Ba(BF4)2
* Ni(BF4)2
* Pb(BF4)2
* Sn(BF4)2
* BaClF
* BaSiF6
* BaGeF6
* BrOF3
* BrO2F
* CBrF3
* CBr2F2
* CBr3F
* CClF3
* CCl2F2
* CCl3F
* CFN
* CF2O
* CF3I
* CHF3
* CH2F2
* CH3F
* C2Cl3F3
* C2H3F
* C6H5F
* C7H5F3
* C15F33N
* ClFO2
* CrFO4
* CrF2O2
* CsBF4
* NH4F
* FNO
* FNO2
* FNO3
* KHF2
* NaHF2
* ThOF2
* NH5F2
* (NH4)2SiF6
* F2OS
* F3OP
* PSF3
* HPF6
* HSbF6
* NH4PF6
* KPF6
* KSbF6
* LiPF6
* NaPF6
* NaSbF6
* Na2SiF6
* Na2TiF6
* Na2ZrF6
* TlPF6
* IOF3
* K2NbF7
* K2TaF7
* IO3F
* UO2F2

Chemical formulas

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