Titanium disilicide

Titanium disilicide[1] Names

IUPAC name

Titanium disilicide

Other names

Titanium silicide

Identifiers

CAS Number

* 12039-83-7 Y

3D model (JSmol)

* Interactive image

EC Number |

* 234-904-3

PubChem CID

* 6336889

InChI

* InChI=1S/2Si.Ti

Key: DFJQEGUNXWZVAH-UHFFFAOYSA-N

SMILES

* [Si]=[Ti]=[Si]

Properties

Chemical formula

| TiSi2
Molar mass | 104.038 g/mol
Appearance  | black orthorhombic crystals
Density | 4.02 g/cm3
Melting point |  1,470 °C (2,680 °F; 1,740 K)

Solubility in water

| insoluble
Solubility | soluble in HF
Hazards
Safety data sheet | [1]
GHS pictograms |
GHS Signal word | Warning

GHS hazard statements

| H228, H315, H319, H335

GHS precautionary statements

| P210, P240, P241, P261, P264, P271, P280, P302+352, P304+340, P305+351+338, P312, P321, P332+313, P337+313, P362, P370+378, P403+233, P405, P501
Related compounds

Other cations

| Zirconium disilicide
Hafnium disilicide

Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Y verify (what is YN ?)
Infobox references

Titanium disilicide (TiSi2) is an inorganic chemical compound of titanium and silicon.

## Preparation

Titanium disilicide can be obtained from the reaction between titanium or titanium hydride with silicon.[2]

Ti + 2 Si → TiSi2

It is also possible to prepare it aluminothermically by the ignition of aluminium powder, sulfur, silicon dioxide, and titanium dioxide or potassium hexafluorotitanate, K2TiF6, by electrolysis of a melt of potassium hexafluorotitanate and titanium dioxide, or by reaction of titanium with silicon tetrachloride.[2]

Another method is the reaction of titanium tetrachloride with silane, dichlorosilane or silicon.[3]

TiCl4 \+ 2 SiH4 → TiSi2 \+ 4 HCl + 2 H2
TiCl4 \+ 2 SiH2Cl2 \+ 2 H2 → TiSi2 \+ 8 HCl
TiCl4 \+ 3 Si → TiSi2 \+ SiCl4

## Uses

Titanium silicide is used in the semiconductor industry. It is typically grown by means of salicide technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections. In the microelectronic industry it is typically used in the C54 phase.

## References

1. ↑ Lide, David R. (1998), Handbook of Chemistry and Physics (87 ed.), CRC Press, pp. 4–91, ISBN 0-8493-0594-2
2. ↑ 2.0 2.1 Brauer, Georg (1978). Handbuch der Präparativen Anorganischen Chemie, Band II. Baudler, Marianne (3rd ed.). Stuttgart: Enke. pp. 1389. ISBN 978-3-432-87813-3. OCLC 310719490. https://www.worldcat.org/oclc/310719490.
3. ↑ Pierson, Hugh O. (1999). Handbook of Chemical Vapor Deposition : Principles, Technology, and Applications (2nd ed.). Norwich, N.Y.: Noyes Publications. pp. 331. ISBN 1-59124-030-1. OCLC 49708617. https://www.worldcat.org/oclc/49708617.

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Titanium compounds

Titanium(II)|

* TiCl2
* TiH2
* TiO
* TiS
* TiSi2

| Organotitanium(II) compounds|

[(C5H5)2Ti(CO)2]

|

Titanium(III)|

* TiAl
* TiBr3
* TiCl3
* TiF3
* TiI3
* TiN
* TiP
* Ti2O3
* Ti2S3

| Organotitanium(III) compounds|

[(C5H5)2TiCl]2

|

Titanium(IV)|

* TiB2
* TiBr4
* TiC
* TiCl4
* Ti(ClO4)4
* TiF4
* H2TiF6
* TiH4
* TiI4
* Ti(NMe2)4
* Ti(NO3)4
* TiO2
* H4TiO4
* Ti4(OCH2CH3)16
* Ti(OCH(CH3)2)4
* Ti(OCH2CH2CH2CH3)4
* KTiOPO4
* NiO*Sb2O3*20TiO2
* TiS2
* TiSe2
* TiSi2

| Titanate compounds|

* BaTiO3
* Ba2TiO4
* Bi4Ti3O12
* CaTiO3
* CaCu3Ti4O12
* CaZrTi2O7
* Cs2TiO3
* Dy2Ti2O7
* EuBaTiO4
* FeTiO3
* Ho2Ti2O7
* Li2TiO3
* MnTiO3
* Na2Ti3O7
* Na0.5Bi0.5TiO3
* NiTiO3
* PbTiO3
* Pb(Zr,Ti)O3
* SrTiO3
* ZnTiO3

|

Organotitanium(IV) compounds|

* [(C5H5)2TiCl2]
* [(C5H5)2Ti(CH3)2]
* [(C5H5)2TiS5]
* [(C5H5)2Ti(μ-Cl)(μ-CH2)Al(CH3)2]
* [(η5-C5H4-CH2C6H4OCH3)2TiCl2]

|

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Retrieved from "https://handwiki.org/wiki/index.php?title=Chemistry:Titanium_disilicide&oldid=442633"
*[CID]: Compound ID
*[H228]: Flammable solid
*[H315]: Causes skin irritation
*[H319]: Causes serious eye irritation
*[H335]: May cause respiratory irritation
*[P210]: Keep away from heat/sparks/open flames/hot surfaces – No smoking
*[P240]: Ground/bond container and receiving equipment
*[P241]: Use explosion-proof electrical/ventilating/light/…/equipment
*[P261]: Avoid breathing dust/fume/gas/mist/vapours/spray
*[P264]: Wash … thoroughly after handling
*[P271]: Use only outdoors or in a well-ventilated area
*[P280]: Wear protective gloves/protective clothing/eye protection/face protection
*[P302+352]: IF ON SKIN: Wash with soap and water
*[P304+340]: IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing
*[P305+351+338]: IF IN EYES: Rinse continuously with water for several minutes. Remove contact lenses if present and easy to do – continue rinsing
*[P312]: Call a POISON CENTER or doctor/physician if you feel unwell
*[P321]: Specific treatment (see … on this label)
*[P332+313]: If skin irritation occurs: Get medical advice/attention
*[P337+313]: Get medical advice/attention
*[P362]: Take off contaminated clothing and wash before reuse
*[P370+378]: In case of fire: Use … for extinction
*[P403+233]: Store in a well ventilated place. Keep container tightly closed
*[P405]: Store locked up
*[P501]: Dispose of contents/container to …
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