Plasma processing

Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.[1]

Plasma processing techniques include:

* Plasma activation
* Plasma ashing
* Plasma cleaning
* Plasma electrolytic oxidation
* Plasma etching
* Plasma functionalization
* Plasma polymerization
* Corona treatment
* Plasma modification

Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching.

## References

1. ↑ National Research Council (1991). Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: National Academies Press. doi:10.17226/1875. ISBN 978-0-309-04597-1. https://doi.org/10.17226/1875.

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