Tungsten disilicide

Tungsten disilicide[1] Names

IUPAC name

Tungsten disilicide

Identifiers

CAS Number

* 12039-88-2 Y

3D model (JSmol)

* Interactive image

ECHA InfoCard | 100.031.723

PubChem CID

* 16212546

CompTox Dashboard (EPA)

* DTXSID6093960

InChI

* InChI=1S/2Si.W

SMILES

* [Si]#[W]#[Si]

Properties

Chemical formula

| WSi2
Molar mass | 240.011 g/mol
Appearance  | blue-gray tetragonal crystals
Density | 9.3 g/cm3
Melting point | 2,160 °C (3,920 °F; 2,430 K)

Solubility in water

| insoluble
Hazards
NFPA 704 (fire diamond)  |

Flash point | Non-flammable
Related compounds

Other anions

| Tungsten carbide
Tungsten nitride

Other cations

| Molybdenum disilicide

Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

N verify (what is YN ?)

Infobox references

Chemical compound

Tungsten disilicide (WSi2) is an inorganic compound, a silicide of tungsten. It is an electrically conductive ceramic material.

## Chemistry

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Tungsten disilicide can react violently with substances such as strong acids, fluorine, oxidizers, and interhalogens.

## Applications

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It is used in microelectronics as a contact material, with resistivity 60–80 μΩ cm; it forms at 1000 °C. It is often used as a shunt over polysilicon lines to increase their conductivity and increase signal speed. Tungsten disilicide layers can be prepared by chemical vapor deposition, e.g. using monosilane or dichlorosilane with tungsten hexafluoride as source gases. The deposited film is non-stoichiometric, and requires annealing to convert to more conductive stoichiometric form. Tungsten disilicide is a replacement for earlier tungsten films.[2] Tungsten disilicide is also used as a barrier layer between silicon and other metals, e.g. tungsten.

Tungsten disilicide is also of value towards use in microelectromechanical systems, where it is mostly applied as thin films for fabrication of microscale circuits. For such purposes, films of tungsten disilicide can be plasma-etched using e.g. nitrogen trifluoride gas.

WSi2 performs well in applications as oxidation-resistant coatings. In particular, in similarity to Molybdenum disilicide, MoSi2, the high emissivity of tungsten disilicide makes this material attractive for high temperature radiative cooling, with implications in heat shields.[3]

## References

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1. ^ Lide, David R. (1998), Handbook of Chemistry and Physics (87 ed.), Boca Raton, FL: CRC Press, pp. 4–91, ISBN 0-8493-0594-2
2. ^ "CVD Products - Materials". Archived from the original on 2001-09-07. Retrieved 2007-08-19.
3. ^ High emissivity coatings on fibrous ceramics for reusable space systems Corrosion Science 2019

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Tungsten compounds

Tungsten(0)|

* W(CO)6
* W(PMe3)6

Tungsten(II)|

* WSi2
* WCl2
* WI2
* W(OH)2
* W2(hpp)4

Tungsten(III)|

* W2O3
* WCl3
* WI3
* W2(OtBu)6

Tungsten(IV)|

* WC
* WO2
* WS2
* WSe2
* WTe2
* WF4
* WCl4
* WBr4
* WI4

Tungsten(V)|

* W2O5
* WBr5
* W2Cl10
* LiWF6

Tungsten(VI)|

* WO2Cl2
* WBr6
* WCl6
* WF6
* WN2
* WO3
* WS3
* WAs2
* WOBr4
* WOCl4
* WOF4
* H2WO4

| Organotungsten(VI) compounds|

* W(CH3)6

|

Polytungstate salts|

* H3PW12O40
* (NH4)10(H2W12O42)
* Na6[H2W12O40]

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Salts and covalent derivatives of the silicide ion

| SiH4
+H |  |  |  | He

|
|
|
|

LiSi | Be2Si | SiB3
SiB6
+B | SiC
+C | Si3N4

+N | SiO2 | SiF4 | Ne
NaSi | Mg2Si | Al  | Si4− | SiP, SiP2

+P | SiS2
-S | SiCl4 | Ar
KSi | CaSi
CaSi2 |  | ScSi Sc5Si3 Sc2Si3 Sc5Si4 | TiSi
TiSi2 | V3Si V5Si3, V6Si5, VSi2, V6Si5 | Cr3Si Cr5Si3, CrSi, CrSi2 | MnSi, MnSi2, Mn9Si2, Mn3Si, Mn5Si3, Mn11Si9 | FeSi2
FeSi
Fe5Si3
Fe2Si
Fe3Si | CoSi, CoSi2, Co2Si, Co3Si  | NiSi, more… | Cu17Si3, Cu56Si11, Cu5Si, Cu33Si7, Cu4Si, Cu19Si6, Cu3Si, Cu87Si13 | Zn  | Ga  | GeSi
+Ge | SiAs, SiAs2
-As
+As | SiSe2 SiSe  | SiBr4 | Kr
RbSi | SrSi2 |  | YSi Y5Si3, Y5Si4, Y3Si5, YSi1.4 | ZrSi Zr5Si3, Zr5Si4, ZrSi2, Zr3Si2, Zr2Si, Zr3Si  | Nb4Si Nb5Si3 | MoSi2
Mo3Si Mo5Si3 | Tc  | RuSi Ru2Si, Ru4Si3, Ru2Si3 | RhSi Rh2Si, Rh5Si3, Rh3Si2, Rh20Si13 | PdSi Pd5Si, Pd9Si2, Pd3Si, Pd2Si  | Ag  | Cd  | In  | Sn  | Sb  | TeSi2 Te2Si3 | SiI4 | Xe
CsSi | Ba2Si BaSi2, Ba5Si3 Ba3Si4 | *  | Lu5Si3 | HfSi Hf2Si, Hf3Si2, Hf5Si4, HfSi2 | Ta9Si2, Ta3Si, Ta5Si3 | WSi2 W5Si3 | ReSi Re2Si, ReSi1.8 Re5Si3 | OsSi | IrSi | PtSi | Au  | Hg  | Tl  | Pb  | Bi  | Po  | At  | Rn
Fr  | Ra  | **  | Lr  | Rf  | Db  | Sg  | Bh  | Hs  | Mt  | Ds  | Rg  | Cn  | Nh  | Fl  | Mc  | Lv  | Ts  | Og

*  | LaSi2 La5Si3, La3Si2, La5Si4, LaSi  | CeSi2 Ce5Si3, Ce3Si2, Ce5Si4, CeSi, Ce3Si5 | PrSi2 Pr5Si3, Pr3Si2, Pr5Si4, PrSi  | NdSi Nd5Si3, Nd5Si4, Nd5Si3, Nd3Si4, Nd2Si3, NdSix | Pm  | SmSi2 Sm5Si4, Sm5Si3, SmSi, Sm3Si5 | Eu?  | GdSi2 Gd5Si3, Gd5Si4, GdSi  | TbSi2 SiTb, Si4Tb5, Si3Tb5 | DySi2 DySi  | HoSi2 Ho5Si3, Ho5Si4, HoSi, Ho4Si5 | ErSi2 Er5Si3, Er5Si4, ErSi  | Tm?  | YbSi Si1.8Yb, Si5Yb3, Si4Yb3, Si4Yb5, Si3Yb5
**  | Ac  | ThSi | PaSi | USi2 | NpSi2 | PuSi | Am  | Cm  | Bk  | Cf  | Es  | Fm  | Md  | No
*[CID]: Compound ID
*[EPA]: U.S. Environmental Protection Agency
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